MANUFACTURING OF PROTECTIVE ELEMENTS ON CHALCOGENIDE FILMS BY THE ELECTRONIC LITHOGRAPHY METHOD

ВИГОТОВЛЕННЯ ЗАХИСНИХ ЕЛЕМЕНТІВ НА ХАЛЬКОГЕНІДНИХ ПЛІВКАХ МЕТОДОМ ЕЛЕКТРОННОЇ ЛІТОГРАФІЇ

ITSec-2023

Cite

Bilanych, V., Shilenko, O., Bilanych, V., Feher, A., Komanicky, V., Rizak, V. (2023). MANUFACTURING OF PROTECTIVE ELEMENTS ON CHALCOGENIDE FILMS BY THE ELECTRONIC LITHOGRAPHY METHOD. ITSec-2023. 17.itsec/article.20234ed

@inproceedings{itsec2023_4ed,
  author    = {Bilanych, V. and Shilenko, O. and Bilanych, V. and Feher, A. and Komanicky, V. and Rizak, V.},
  title     = {MANUFACTURING OF PROTECTIVE ELEMENTS ON CHALCOGENIDE FILMS BY THE ELECTRONIC LITHOGRAPHY METHOD},
  booktitle = {ITSec-2023},
  year      = {2023},
  note      = {17.itsec/article.20234ed}
}